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Formation of nanoscale dots on glass surface by microprobe ion manipulation

Author(s):
  • Yano, T. ( Tokyo Institute of Technology (Japan) )
  • Kubota, S. ( Tokyo Institute of Technology (Japan) )
  • Kato, H. ( Tokyo Institute of Technology (Japan) )
  • Shibata, S. ( Tokyo Institute of Technology (Japan) )
Publication title:
Nanoengineering: fabrication, properties, optics, and devices : 4-6 August, 2004, Denver, Colorado
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5515
Pub. Year:
2004
Page(from):
203
Page(to):
212
Pages:
10
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819454539 [0819454532]
Language:
English
Call no.:
P63600/5515
Type:
Conference Proceedings

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