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Evaluation of thermal loading effects of laser Doppler vibrometer applied to micro-electro-mechanical systems(MEMS)

Author(s):
Publication title:
Sixth International Conference on Vibration Measurements by Laser Techniques: Advances and Applications : 22-25 June 2004, Ancona, Italy
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5503
Pub. Year:
2004
Page(from):
468
Page(to):
477
Pages:
10
Pub. info.:
Bellingham, Wash., USA: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819454362 [0819454362]
Language:
English
Call no.:
P63600/5503
Type:
Conference Proceedings

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