Compact XUV excimer radiation sources and their application

Compact XUV excimer radiation sources and their application

Author(s):

Fedenev, A. V. ( High Current Elecfronics Instifute (Russia) )
Morozov, A. ( Technische Univ. Munchen (Germany) )
Wieser, J. ( TuiLaser A G (Germany) )
Uirich, A. ( Technische Univ. Munchen (Germany) )

Publication title:

Atomic and molecular pulsed lasers V : 15-19 September 2003, Tomsk, Russia

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

5483

Pub. Year:

2004

Page(from):

297

Page(to):

304

Pages:

8

Pub. info.:

Bellingham, Wash., USA: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819454133 [0819454133]

Language:

English

Call no.:

P63600/5483

Type:

Conference Proceedings

Details

TDL ID:	ZA00014674
Series ID:	PA00000029
Conf. info. (Name):	Atomic and molecular pulsed lasers
Conf. info. (Number):	2003 : 5th
Conf. info. (Venue):	Tomsk, Russia
Conf. info. (Date):	2003.09.15-2003.09.19

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