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Real-time shape measurement system including CG output

Author(s):
Publication title:
Optical Micro- and Nanometrology in Manufacturing Technology
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5458
Pub. Year:
2004
Page(from):
117
Page(to):
128
Pages:
12
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819453808 [0819453803]
Language:
English
Call no.:
P63600/5458
Type:
Conference Proceedings

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