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Thickness measurement of thin transparent plates with a broadband wavelength-scanning interferometer

Author(s):
Maddaloni, P. ( Istituto Nazionale di Ottica Applicata (Italy) )
Coppola, G. ( Istituto per la Microelettronica e Microsistemi, CNR (Italy) )
De Natale, P. ( Istituto Nazionale di Ottica Applicata (Italy) )
De Nicola, S. ( Istituto di Cibernetica, CNR (Italy) )
Ferraro, P. ( Istituto Nazionale di Ottica Applicata (Italy) )
Gioffre, M. ( Istituto per la Microelettronica e Microsistemi, CNR (Italy) )
Iodice, M. ( Istituto per la Microelettronica e Microsistemi, CNR (Italy) )
2 more
Publication title:
Optical Micro- and Nanometrology in Manufacturing Technology
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5458
Pub. Year:
2004
Page(from):
64
Page(to):
70
Pages:
7
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819453808 [0819453803]
Language:
English
Call no.:
P63600/5458
Type:
Conference Proceedings

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