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Optical MEMS components fabrication using micromachning of (111)-oriented silicon wafers

Author(s):
  • Cristea, D. ( National Institute for Research and Development in Microtechnologies (Romania) )
  • Manea, E. ( National Institute for Research and Development in Microtechnologies (Romania) )
  • Kusko, M. ( National Institute for Research and Development in Microtechnologies (Romania) )
Publication title:
MEMS, MOEMS, and Micromachining
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5455
Pub. Year:
2004
Page(from):
381
Page(to):
389
Pages:
9
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819453785 [0819453781]
Language:
English
Call no.:
P63600/5455
Type:
Conference Proceedings

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