Piezoelectric actuation for application in RF MEMS switches

Piezoelectric actuation for application in RF MEMS switches

Author(s):

Klaasse, G. ( IMEC (Belgium) and Katholieke Univ. Leuven (Belgium) )
Puers, B. ( Katholieke Univ. Leuven (Belgium) )
Tilmans, H. A. C. ( IMEC (Belgium) )

Publication title:

MEMS, MOEMS, and Micromachining

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

5455

Pub. Year:

2004

Page(from):

174

Page(to):

180

Pages:

7

Pub. info.:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819453785 [0819453781]

Language:

English

Call no.:

P63600/5455

Type:

Conference Proceedings

Details

TDL ID:	ZA00014646
Series ID:	PA00000029
Conf. info. (Name):	Photonics Europe : MEMS, MOEMS, and micromachining
Conf. info. (Number):	2004
Conf. info. (Venue):	Strasbourg, France
Conf. info. (Date):	2004.04.29-2004.04.30

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