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Damping analysis and measurement for a comb-drive scanning mirror

Author(s):
Sandner, T. ( Fraunhofer-Institut fur Photonische Mikrosysteme (Germany) )
Klose, T. ( Fraunhofer-Institut fur Photonische Mikrosysteme (Germany) )
Wolter, A. ( Fraunhofer-Institut fur Photonische Mikrosysteme (Germany) )
Schenk, H. ( Fraunhofer-Institut fur Photonische Mikrosysteme (Germany) )
Lakner, H. K. ( Fraunhofer-Institut fur Photonische Mikrosysteme (Germany) )
Davis, W. ( Microvision, Inc. (USA) )
1 more
Publication title:
MEMS, MOEMS, and Micromachining
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5455
Pub. Year:
2004
Page(from):
147
Page(to):
158
Pages:
12
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819453785 [0819453781]
Language:
English
Call no.:
P63600/5455
Type:
Conference Proceedings

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