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Designing manufacturable MEMS in CMOS-compatible processes: methodology and case studies

Author(s):
Schropfer, G. ( Coventor SARL (France) )
McNie, M. ( QinetiQ Ltd. (United Kingdom) )
da Silva, M. ( Coventor, Inc. (USA) )
Davies, R. ( QinetiQ Ltd. (United Kingdom) )
Rickard, A. ( QinetiQ Ltd. (United Kingdom) )
Musalem, F. -X. ( Coventor SARL (France) )
1 more
Publication title:
MEMS, MOEMS, and Micromachining
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5455
Pub. Year:
2004
Page(from):
116
Page(to):
127
Pages:
12
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819453785 [0819453781]
Language:
English
Call no.:
P63600/5455
Type:
Conference Proceedings

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