Fabrication end-test of the micro scanning mirror
- Author(s):
- Wolter, A. ( Fraunhofer-Institut fur Photonische Mikrosysteme (Germany) )
- Gaumont, E. ( Fraunhofer-Institut fur Photonische Mikrosysteme (Germany) )
- Korth, H. ( Fraunhofer-Institut fur Photonische Mikrosysteme (Germany) )
- Schenk, H. ( Fraunhofer-Institut fur Photonische Mikrosysteme (Germany) )
- Lakner, H. K. ( Fraunhofer-Institut fur Photonische Mikrosysteme (Germany) )
- Publication title:
- MEMS, MOEMS, and Micromachining
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 5455
- Pub. Year:
- 2004
- Page(from):
- 54
- Page(to):
- 65
- Pages:
- 12
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819453785 [0819453781]
- Language:
- English
- Call no.:
- P63600/5455
- Type:
- Conference Proceedings
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