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Low-cost single-mode waveguide fabrication allowing passive fiber coupling using LIGA and UV flood exposure

Author(s):
  • Henzi, P. ( Forschungszentrum Karlsruhe, (Germany) )
  • Rabus, D. G. ( Forschungszentrum Karlsruhe, (Germany) )
  • Bade, K. ( Forschungszentrum Karlsruhe, (Germany) )
  • Wallrabe, U. ( Forschungszentrum Karlsruhe, (Germany) )
  • Mohr, J. ( Forschungszentrum Karlsruhe, (Germany) )
Publication title:
Micro-Optics: Fabrication, Packaging, and Integration
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5454
Pub. Year:
2004
Page(from):
64
Page(to):
74
Pages:
11
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819453778 [0819453773]
Language:
English
Call no.:
P63600/5454
Type:
Conference Proceedings

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