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Surface micromachining and characterization of pyroelectric infrared ray focal plane array utilizing Pb(Zr0.3Ti0.7)O3 thin films

Author(s):
Ryu, S. O. ( Electronics and Telecommunications Research Institute (South Korea) )
Cho, S. M. ( Electronics and Telecommunications Research Institute (South Korea) )
You, I. K. ( Electronics and Telecommunications Research Institute (South Korea) )
Yoon, S. M. ( Electronics and Telecommunications Research Institute (South Korea) )
Kim, K. D. ( Electronics and Telecommunications Research Institute (South Korea) )
Yu, B. G. ( Electronics and Telecommunications Research Institute (South Korea) )
1 more
Publication title:
Materials for infrared detectors III : 7-8 August 2003, San Diego, California, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5209
Pub. Year:
2003
Page(from):
148
Page(to):
155
Pages:
8
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819450821 [0819450820]
Language:
English
Call no.:
P63600/5209
Type:
Conference Proceedings

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