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Investigation of heat transfer in micromirrors

Author(s):
  • Kehr, K. ( Chemnitz Univ. of Technology (Germany) )
  • Kurth, S. ( Chemnitz Univ. of Technology (Germany) )
  • Mehner, J. ( Chemnitz Univ. of Technology (Germany) )
  • Dotzel, W. ( Chemnitz Univ. of Technology (Germany) )
  • Cessner, T. ( Chemnitz Univ. of Technology (Germany) )
Publication title:
Microsystems Metrology and Inspection
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3825
Pub. Year:
1999
Page(from):
24
Page(to):
35
Pages:
12
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819433114 [081943311X]
Language:
English
Call no.:
P63600/3825
Type:
Conference Proceedings

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