Blank Cover Image

Role of interfacial properties on MEMS performance and reliability (Invited Paper)

Author(s):
Publication title:
Microsystems Metrology and Inspection
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3825
Pub. Year:
1999
Page(from):
2
Page(to):
15
Pages:
14
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819433114 [081943311X]
Language:
English
Call no.:
P63600/3825
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Friction measurement in MEMS using a new test structure

Crozier, B. T., Boer, M. P. de, Redmond, J. M., Bahr, D. F., Michalske, T. A.

MRS-Materials Research Society
7 Conference Proceedings Polyimide MEMS actuators for medical imaging (Invited Paper)

Zara, J.M., Mills, P., Patterson, P.

SPIE - The International Society of Optical Engineering
2 Conference Proceedings Adhesion of Polysilicon Microbeams in Controlled Humidity Ambients

Boer, M. P. de, Clews, P. J., Smith, B. K., Michalske, T. A.

MRS - Materials Research Society
8 Conference Proceedings Structure and properties of fullerene nanowhiskers prepared by the liquid-liquid interfacial precipitation method (Invited Paper)

Miyazawa, K., Fujino, M., Minato, J., Yoshii, T., Kizuka, T., Suga, T.

SPIE - The International Society of Optical Engineering
3 Conference Proceedings A hinged-pad test structure for sliding friction measurement in micromachining

de Boer,M.P., Redmond,J.M., Michalske,T.A.

SPIE-The International Society for Optical Engineering
9 Conference Proceedings Reliability and Properties of PZT Thin Films for MEMS Applications

Bahr, D.F., Merlino, J.C., Yip, C.M., Banerjee, P., Byopadhyay, A.

Materials Research Society
4 Conference Proceedings MEMS based tunable infrared sensors (Invited Paper)

Antoszewski, J., Winchester, K. J., Keating, A. J., Nguyen, T., Silva, K. K. M. B. D., Huang, H., Musca, C. A., Dell, J. …

SPIE - The International Society of Optical Engineering
10 Conference Proceedings MEMS mirror array for a wavelength-selective 1xK switch (Invited Paper)

Lopez, D.O., Pardo, F., Aksyuk, V.A., Simon, M.E., Shea, H.R., Marom, D.M., Neilson, D.T., Cirelli, R.A., Klemens, F.P., …

SPIE-The International Society for Optical Engineering
5 Conference Proceedings Improved Autoadhesion Measurement Method for Micromachined Polysilicon Beams

Boer, Maarten P. de, Michalske, Terry A.

MRS - Materials Research Society
11 Conference Proceedings Fundamental noise in MEMS force sensors (Invited Paper)

Kenny, T. W., Liang, Y., Pruitt, B. L., Harley, J. A., Bartsch, M., Rudnitsky, R.

SPIE - The International Society of Optical Engineering
6 Conference Proceedings Performance and reliability of ARROW single-mode and 100-μm laser diode and the use of NAM in Al-free lasers (Invited Paper)

Kanskar, M., Nesnidal, M., Meassick, S., Goulakov, A., Stiers, E., Dai, Z., Earles, T.E., Forbes, D., Hansen, D., …

SPIE-The International Society for Optical Engineering
12 Conference Proceedings Role of chiral symmetry in second-order nonlinear optical materials (Invited Paper)

Van Elshocht,S., Verbiest,T., Kauranen,M., Nolte,R.J.M., Meijer,E.W., Persoons,A.P.

SPIE-The International Society for Optical Engineering
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12