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Optical properties of ZnSe diffractive optical elements for spot array generation

Author(s):
  • Ebata, K. ( Sumitomo Electric Industries, Ltd. (Japan) )
  • Fuse, K. ( Sumitomo Electric Industries, Ltd. (Japan) )
  • Shiozaki, M. ( Sumitomo Electric Industries, Ltd. (Japan) )
  • Hattori, T. ( Sumitomo Electric Industries, Ltd. (Japan) )
Publication title:
Laser metrology and inspection : 14-15 June 1999, Munich, Germany
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3823
Pub. Year:
1999
Page(from):
224
Page(to):
234
Pages:
11
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819433091 [0819433098]
Language:
English
Call no.:
P63600/3823
Type:
Conference Proceedings

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