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Inspection and printability of programmed defects on reticles for 0.200- and 0.175-μm rule devices

Author(s):
Yamaguchi, S. ( Toshiba Corp. (Japan) )
Kanai, H. ( Toshiba Corp. (Japan) )
Komano, H. ( Toshiba Corp. (Japan) )
Sakurai, H. ( Toshiba Corp. (Japan) )
Kondo, T. ( Toshiba Corp. (Japan) )
Itoh, M. ( Toshiba Corp. (Japan) )
Mori, I. ( Toshiba Corp. (Japan) )
Higashikawa, I. ( Toshiba Corp. (Japan) )
3 more
Publication title:
Photomask and X-Ray Mask Technology VI
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3748
Pub. Year:
1999
Page(from):
546
Page(to):
556
Pages:
11
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819432308 [081943230X]
Language:
English
Call no.:
P63600/3748
Type:
Conference Proceedings

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