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Advanced Cr dry etching process

Author(s):
Aoyama, S. ( Mitsubishi Electric Corp. (Japan) )
Sakamoto, S. ( Mitsubishi Electric Corp. (Japan) )
Koike, T. ( Mitsubishi Electric Corp. (Japan) )
Yoshioka, N. ( Mitsubishi Electric Corp. (Japan) )
Harashima, N. ( Ulvac Coating Corp. (Japan) )
Hayashi, A. ( Ulvac Coating Corp. (Japan) )
Sasaki, T. ( Ulvac Coating Corp. (Japan) )
2 more
Publication title:
Photomask and X-Ray Mask Technology VI
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3748
Pub. Year:
1999
Page(from):
137
Page(to):
146
Pages:
10
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819432308 [081943230X]
Language:
English
Call no.:
P63600/3748
Type:
Conference Proceedings

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