Primary evaluation of proximity and resist heating effects observed in high-acceleration voltage e-beam writing for 180-nm-and-beyond rule reticle fabrication

Primary evaluation of proximity and resist heating effects observed in high-acceleration voltage e-beam writing for 180-nm-and-beyond rule reticle fabrication

Author(s):

Kuwahara, N. ( Dai Nippon Printing Co., Ltd. (Japan) )

Nakagawa, H. ( Dai Nippon Printing Co., Ltd. (Japan) )

Kurihara, M. ( Dai Nippon Printing Co., Ltd. (Japan) )

Hayashi, N. ( Dai Nippon Printing Co., Ltd. (Japan) )

Sano, H. ( Dai Nippon Printing Co., Ltd. (Japan) )

Maruta, E. ( Dai Nippon Printing Co., Ltd. (Japan) )

Takikawa, T. ( Dai Nippon Printing Co., Ltd. (Japan) )

Noguchi, S. ( Dai Nippon Printing Co., Ltd. (Japan) )

3 more

Publication title:

Photomask and X-Ray Mask Technology VI

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

3748

Pub. Year:

1999

Page(from):

115

Page(to):

125

Pages:

11

Pub. info.:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819432308 [081943230X]

Language:

English

Call no.:

P63600/3748

Type:

Conference Proceedings

Details

TDL ID:	ZA00014623
Series ID:	PA00000029
Conf. info. (Name):	Photomask and Next Generation Lithography Mask Technology : Photomask and X-Ray Mask Technology
Conf. info. (Number):	1999 : 6th
Conf. info. (Venue):	Yokohama, Japan
Conf. info. (Date):	1999.04.13-1999.04.14

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