Chemically amplified resist based on the methacrylate polymer with 2-trimethylsilyl-2-propyl ester protecting group
- Author(s):
- Kim, J. -B. ( Korea Advanced Institute of Science and Technology )
- Kim, H. ( Korea Advanced Institute of Science and Technology )
- Lee, S. -H. ( Samsung Electronics Co., Ltd. (Korea) )
- Choi, S. -J. ( Samsung Electronics Co., Ltd. (Korea) )
- Moon, J. -T. ( Samsung Electronics Co., Ltd. (Korea) )
- Publication title:
- Microlithography 1999 : advances in resist technology and processing XVI : 15-17 March 1999, Santa Clara, California
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 3678
- Pub. Year:
- 1999
- Page(from):
- 420
- Page(to):
- 428
- Pages:
- 9
- Pub. info.:
- Bellingham, Wash., USA: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819431523 [0819431524]
- Language:
- English
- Call no.:
- P63600/3678-1
- Type:
- Conference Proceedings
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