Chemically amplified resists: past, present, and future (Invited Paper)

Chemically amplified resists: past, present, and future (Invited Paper)

Author(s):: Ito, H. ( IBM Almaden Research Ctr. )
Publication title:: Microlithography 1999 : advances in resist technology and processing XVI : 15-17 March 1999, Santa Clara, California
Title of ser.:: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:: 3678
Pub. Year:: 1999
Page(from):: 2
Page(to):: 12
Pages:: 11
Pub. info.:: Bellingham, Wash., USA: SPIE - The International Society of Optical Engineering
ISSN:: 0277786X
ISBN:: 9780819431523 [0819431524]
Language:: English
Call no.:: P63600/3678-1
Type:: Conference Proceedings

Details

TDL ID:	ZA00014620
Series ID:	PA00000029
Conf. info. (Name):	SPIE Advanced Lithography : Microlithography
Conf. info. (Number):	1999 : 16th
Conf. info. (Venue):	Santa Clara, CA, USA
Conf. info. (Date):	1999.03.15-1999.03.17

Similar Items:

1 Conference Proceedings Windows and domes: past, present, and future (Invited Paper) Tropf, W.J., Thomas, M.E., Frazer, R.K. SPIE-The International Society for Optical Engineering	7 Conference Proceedings The past, present, and future of head-mounted display designs (Invited Paper) Rolland, J. P., Cakmakci, O. SPIE - The International Society of Optical Engineering
2 Conference Proceedings NMR analysis of chemically amplified resist films Ito, H., Sherwood, M. SPIE - The International Society of Optical Engineering	8 Conference Proceedings Past, present, and future instrumentation at Gemini Observatory (Invited Paper) [6269-04] Douglas A. Simons, Joseph B. Jensen, Celine d'Orgeville, Peter M. Gray, Manuel Lazo, Rolando Rogers, Michael P. Sheehan, … SPIE - The International Society of Optical Engineering
3 Conference Proceedings Rise of chemical amplification resists from laboratory curiosity to paradigm enabling Moore's law H. Ito Society of Photo-optical Instrumentation Engineers	9 Conference Proceedings Silicon photonics technology: past, present, and future (Invited Paper) [5730-02] R. Soref SPIE
4 Conference Proceedings Airborne laser communications: past, present, and future (Invited Paper) [5892-09] Maynard, J. A., Begley, D. SPIE - The International Society of Optical Engineering	10 Conference Proceedings Past, present and future of phosensitisers Pottier H. R. Springer-Verlag
5 Conference Proceedings Color imaging systems and color theory: past,present,and future (Invited Paper) McCann,J.J. SPIE-The International Society for Optical Engineering	11 Conference Proceedings Polarity Change for the Design of Chemical Amplification Resists Ito, Hiroshi American Chemical Society
6 Conference Proceedings Automated defect inspection: past,present,and future (Invited Paper) Sandland,P. SPIE-The International Society for Optical Engineering	12 Conference Proceedings Chemically amplified resist convertible into inorganic silicate glass (GPR) M. Sakata, M. Kosuge, H. Jinbo, T. Ito Society of Photo-optical Instrumentation Engineers

1

2

3

4

5

6

7

8

9

10

11

12