Development of a new automatic gauge block interferometer up to 250 mm

Development of a new automatic gauge block interferometer up to 250 mm

Author(s):

Narumi, T. ( Mitutoyo Corp. (Japan) )
Shutoh, S. ( Mitutoyo Corp. (Japan) )
Nakamura, T. ( Mitutoyo Corp. (Japan) )
Iida, J. ( Mitutoyo Corp. (Japan) )
Sawabe, M. ( Mitutoyo Corp. (Japan) )

Publication title:

Recent Developments in Optical Gauge Block Metrology

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

3477

Pub. Year:

1998

Page(from):

76

Page(to):

81

Pages:

6

Pub. info.:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819429322 [0819429325]

Language:

English

Call no.:

P63600/3477

Type:

Conference Proceedings

Details

TDL ID:	ZA00014614
Series ID:	PA00000029
Conf. info. (Name):	Optics & Photonics : Recent developments in optical gauge block metrology
Conf. info. (Number):	1998
Conf. info. (Venue):	San Diego, CA, USA
Conf. info. (Date):	1998.07.20-1998.07.21

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