A Semiconductor Nano-Patterning Approach Using AFM-Scratching Through Oxide Thin Layers

A Semiconductor Nano-Patterning Approach Using AFM-Scratching Through Oxide Thin Layers

Author(s):

Publication title:

Nanomaterials for structural applications

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

740

Pub. Year:

2003

Page(from):

205

Page(to):

420

Pages:

222

Pub. info.:

Warrendale, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9781558996779 [155899677X]

Language:

English

Call no.:

M23500/740

Type:

Conference Proceedings

Details

TDL ID:	ZA00014611
Series ID:	PA00000011
Conf. info. (Name):	Symposium on nanomaterials for structural applications ; MRS Fall Meeting
Conf. info. (Number):	2002 ; 2002
Conf. info. (Venue):	Boston, Massachusetts, USA
Conf. info. (Date):	2002.12.02-2002.12.06

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