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Confocal Optoelectronic Holography Microscope for Materials and Structural Characterization of MEMS

Author(s):
Publication title:
Spatially resolved characterization of local phenomena in materials and nanostructures : symposium held December 2-5, 2002, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
738
Pub. Year:
2003
Page(from):
109
Page(to):
228
Pages:
126
Pub. info.:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558996755 [1558996753]
Language:
English
Call no.:
M23500/738
Type:
Conference Proceedings

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