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Mechanical Enhancement of Nanoporous Low-k Films as Interlayer Dielectrics by Ion Implantation

Author(s):
Publication title:
Polymer/metal interfaces and defect mediated phenomena in ordered polymers : symposia held December 2-6, 2002, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
734
Pub. Year:
2003
Page(from):
109
Page(to):
232
Pages:
132
Pub. info.:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558996717 [1558996710]
Language:
English
Call no.:
M23500/734
Type:
Conference Proceedings

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