Theoretical And Experimental Investigation Of Thermal Stability Of Hfo2/Si And Hfo2/SiO2 Interfaces

Theoretical And Experimental Investigation Of Thermal Stability Of Hfo2/Si And Hfo2/SiO2 Interfaces

Author(s):

Publication title:

Modeling and numerical simulation of materials behavior and evolution : symposium held April 2-5, 2002, San Francisco, California, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

731

Pub. Year:

2002

Page(from):

281

Page(to):

568

Pages:

292

Pub. info.:

Warrendale, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9781558996670 [1558996672]

Language:

English

Call no.:

M23500/731

Type:

Conference Proceedings

Details

TDL ID:	ZA00014604
Series ID:	PA00000011
Conf. info. (Name):	Symposium on modeling and numerical simulation of materials behavior and evolution
Conf. info. (Number):	2002
Conf. info. (Venue):	San Francisco, CA, USA
Conf. info. (Date):	2002.04.02-2002.04.05

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