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In-situ Studies of Silicide Formation in Ti-Ta Bilayer Thin Films on Poly-Si

Author(s):
Publication title:
Magnetic and electronic films : microstructure, texture and application to data storage : symposium held April 1-4, 2002, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
721
Pub. Year:
2002
Page(from):
43
Page(to):
50
Pages:
8
Pub. info.:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558996571 [1558996575]
Language:
English
Call no.:
M23500/721
Type:
Conference Proceedings

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