Optimization Of Thermal Processing And Chemistry In The Fabrication Of A PZT Based MEMS Power Generator

Optimization Of Thermal Processing And Chemistry In The Fabrication Of A PZT Based MEMS Power Generator

Author(s):

Publication title:

Perovskite materials : symposium held April 1-5, 2002, San Francisco, California, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

718

Pub. Year:

2002

Page(from):

225

Page(to):

232

Pages:

8

Pub. info.:

Warrendale, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9781558996540 [1558996540]

Language:

English

Call no.:

M23500/718

Type:

Conference Proceedings

Details

TDL ID:	ZA00014591
Series ID:	PA00000011
Conf. info. (Name):	Symposium on perovskite materials
Conf. info. (Number):	2002
Conf. info. (Venue):	San Francisco, CA, USA
Conf. info. (Date):	2002.04.01-2002.04.05

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