Thermodynamic Stability Of High-K Dielectric Metal Oxides ZrO2 and HfO2 in Contact With Si and SiO2
- Author(s):
Gutowski, Maciej Jaffe, John E. Liu, Chun-Li Stoker, Matt Hegde, Rama I. Rai, Raghaw S. Tobin, Philip J. - Publication title:
- Silicon materials - processing characterization and reliability : symposium held April 1-5, 2002, San Francisco, California, U.S.A.
- Title of ser.:
- Materials Research Society symposium proceedings
- Ser. no.:
- 716
- Pub. Year:
- 2002
- Page(from):
- 127
- Page(to):
- 132
- Pages:
- 6
- Pub. info.:
- Warrendale: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558996526 [1558996524]
- Language:
- English
- Call no.:
- M23500/716
- Type:
- Conference Proceedings
Similar Items:
1
Conference Proceedings
Theoretical And Experimental Investigation Of Thermal Stability Of Hfo2/Si And Hfo2/SiO2 Interfaces
Materials Research Society |
Materials Research Society |
2
Conference Proceedings
Oxides, Silicides, And Silicates Of Zirconium And Hafnium; Density Functional Theory Study
Materials Research Society |
Materials Research Society |
Electrochemical Society |
9
Conference Proceedings
Evaluation Of Candidate Metals For Dual-Metal Gate Cmos With Hfo_2 Gate Dielectric
Materials Research Society |
4
Conference Proceedings
GROWTH AND SURFACE MORPHOLOGY OF THIN SILICON FILMS USING AN ATOMIC FORCE MICROSCOPE
Materials Research Society |
Materials Research Society |
5
Conference Proceedings
GROWTH AND SURFACE MORPHOLOGY OF THIN SILICON FILMS USING AN ATOMIC FORCE MICROSCOPE
Materials Research Society |
11
Conference Proceedings
Interaction between Two Ni-Base Alloys and Oxide Ceramics:SiO2,ZrO2,HfO2,Al2O3
Trans Tech Publications |
Electrochemical Society |
Materials Research Society |