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Computational Modeling of Homogeneous Nucleation and Particle Growth During Chemical Vapor Deposition of Silicon Films from Silane Plasmas

Author(s):
Publication title:
Amorphous and heterogeneous silicon-based films - 2002 : symposium held April 2-5, 2002, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
715
Pub. Year:
2002
Page(from):
31
Page(to):
36
Pages:
6
Pub. info.:
Warrendale: Materials Research Society
ISSN:
02729172
ISBN:
9781558996519 [1558996516]
Language:
English
Call no.:
M23500/715
Type:
Conference Proceedings

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