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Formation of Al Nanodot Array by the Combination of Nano-Indentation and Anodic Oxidation

Author(s):
Publication title:
Nanopatterning : from ultralarge-scale integration to biotechnology : symposium held November 25-29, 2001, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
705
Pub. Year:
2002
Page(from):
133
Page(to):
138
Pages:
6
Pub. info.:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558996410 [1558996419]
Language:
English
Call no.:
M23500/705
Type:
Conference Proceedings

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