Monitoring of Silicon Nano-Crystal Dots Formation on SiO2 and on Si3N4 in an UHV-CVD System

Monitoring of Silicon Nano-Crystal Dots Formation on SiO2 and on Si3N4 in an UHV-CVD System

Author(s):

Kawashima, Takayuki

Publication title:

Nanoparticulate materials : symposium held November 26-29, 2001, Boston, Massachusetts, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

704

Pub. Year:

2002

Page(from):

251

Page(to):

256

Pages:

6

Pub. info.:

Warrendale, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9781558996403 [1558996400]

Language:

English

Call no.:

M23500/704

Type:

Conference Proceedings

Details

TDL ID:	ZA00014578
Series ID:	PA00000011
Conf. info. (Name):	Symposium on nanoparticulate materials
Conf. info. (Number):	2001
Conf. info. (Venue):	Boston, MA, USA
Conf. info. (Date):	2001.11.26-2001.11.29

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