Refractory Thin-Film Metallizations With Controlled Stress and Electrical Resistivity

Refractory Thin-Film Metallizations With Controlled Stress and Electrical Resistivity

Author(s):

Publication title:

Electrically based microstructural characterization III : symposium held November 26-29, 2001, Boston, Massachusetts, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

699

Pub. Year:

2002

Page(from):

307

Page(to):

312

Pages:

6

Pub. info.:

Warrendale, PA: Materials Research Society

ISSN:

02729172

ISBN:

9781558996359 [1558996354]

Language:

English

Call no.:

M23500/699

Type:

Conference Proceedings

Details

TDL ID:	ZA00014574
Series ID:	PA00000011
Conf. info. (Name):	Symposium on electrically based microstructural characterization
Conf. info. (Number):	3rd
Conf. info. (Venue):	Boston, MA, USA
Conf. info. (Date):	2001.11.26-2001.11.29

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