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Radio-Frequency Impedance Analysis of Anodic Tantalum Pentoxide Thin Films

Author(s):
Publication title:
Electrically based microstructural characterization III : symposium held November 26-29, 2001, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
699
Pub. Year:
2002
Page(from):
185
Page(to):
190
Pages:
6
Pub. info.:
Warrendale, PA: Materials Research Society
ISSN:
02729172
ISBN:
9781558996359 [1558996354]
Language:
English
Call no.:
M23500/699
Type:
Conference Proceedings

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