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Chemical Vapor Deposition by Pulsed Ultrasonic Direct Injection of Liquid Precursors Produces Versatile Method for Creation of Thin Film Circuits and Devices

Author(s):
Leiby, Mark W.  
Publication title:
Electroactive polymers and rapid prototyping : symposium held November 26-30, 2001, Boston, Massachusetts, U.S.A
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
698
Pub. Year:
2002
Page(from):
321
Page(to):
328
Pages:
8
Pub. info.:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558996342 [1558996346]
Language:
English
Call no.:
M23500/698
Type:
Conference Proceedings

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