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Precise Control of CVD-ZrO2 Film Properties Based on Kinetic Information

Author(s):
Publication title:
Surface engineering 2001 - fundamentals and applications : symposium held November 26-29, 2001, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
697
Pub. Year:
2002
Page(from):
195
Page(to):
200
Pages:
6
Pub. info.:
Warrendale, Penn: Materials Research Society
ISSN:
02729172
ISBN:
9781558996335 [1558996338]
Language:
English
Call no.:
M23500/697
Type:
Conference Proceedings

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