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Iridium Based Electrodes for Ferroelectric Capacitor Fabrication

Author(s):
Publication title:
Ferroelectric Thin Films X : symposium held November 25-29, 2001, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
688
Pub. Year:
2002
Page(from):
59
Page(to):
66
Pages:
8
Pub. info.:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558996243 [1558996249]
Language:
English
Call no.:
M23500/688
Type:
Conference Proceedings

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