Fracture Strength of Polysilicon Thin Films at Stress Concentrations
- Author(s):
- Publication title:
- Materials science of microelectromechanical systems (MEMS) devices IV : symposium held November 25-28, 2001, Boston, Massachusetts, U.S.A.
- Title of ser.:
- Materials Research Society symposium proceedings
- Ser. no.:
- 687
- Pub. Year:
- 2002
- Page(from):
- 285
- Page(to):
- 292
- Pages:
- 8
- Pub. info.:
- Warrendale, Pa.: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558996236 [1558996230]
- Language:
- English
- Call no.:
- M23500/687
- Type:
- Conference Proceedings
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