Silicon Microfabrication: Laser Ablation vs. Inductively Coupled Plasma (ICP) Etch

Silicon Microfabrication: Laser Ablation vs. Inductively Coupled Plasma (ICP) Etch

Author(s):

Publication title:

Materials science of microelectromechanical systems (MEMS) devices IV : symposium held November 25-28, 2001, Boston, Massachusetts, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

687

Pub. Year:

2002

Page(from):

271

Page(to):

278

Pages:

8

Pub. info.:

Warrendale, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9781558996236 [1558996230]

Language:

English

Call no.:

M23500/687

Type:

Conference Proceedings

Details

TDL ID:	ZA00014563
Series ID:	PA00000011
Conf. info. (Name):	Symposium on materials science of microelectromechanical systems (MEMS) devices
Conf. info. (Number):	4th
Conf. info. (Venue):	Boston, MA, USA
Conf. info. (Date):	2001.11.25-2001.11.28

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