Wafer Bonding of Diamond Films to Silicon for Silicon-on-Insulator Technology
- Author(s):
Yushin, Gleb N. Wolter, Scott D. Kvit, Alexander V. Collazo, Ramon Prater, John T. Stoner, Brian R. Sitar, Zlatko - Publication title:
- Materials issues in novel si-based technology : symposium held November 26-28, 2001, Boston, Massachusetts, U.S.A.
- Title of ser.:
- Materials Research Society symposium proceedings
- Ser. no.:
- 686
- Pub. Year:
- 2002
- Page(from):
- 69
- Page(to):
- 74
- Pages:
- 6
- Pub. info.:
- Warrendale, Pa.: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558996229 [1558996222]
- Language:
- English
- Call no.:
- M23500/686
- Type:
- Conference Proceedings
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