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Texture Evolution in Al(Cu) Interconnect Materials

Author(s):
Publication title:
Mechanisms of surface and microstructure evolution in deposited films and film structures : symposium held April 17-20, 2001, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
672
Pub. Year:
2001
Pages:
6
Pub. info.:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558996083 [1558996087]
Language:
English
Call no.:
M23500/672
Type:
Conference Proceedings

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