Increased Thermal Stability of Co-Silicide Using Co-Ta Alloy Films | 東京工業大学附属図書館文献データベース

Blank Cover Image

Increased Thermal Stability of Co-Silicide Using Co-Ta Alloy Films

Author(s):

Fujihara, Kazuyuki

Publication title:

Gate stack and silicide issues in silicon processing II : symposium held April 17-19, 2001, San Francisco, California, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

670

Pub. Year:

2002

Pages:

6

Pub. info.:

Warrendale, PA: Materials Research Society

ISSN:

02729172

ISBN:

9781558996069 [1558996060]

Language:

English

Call no.:

M23500/670

Type:

Conference Proceedings

Details

TDL ID:	ZA00014553
Series ID:	PA00000011
Conf. info. (Name):	Symposium On Gate Stack And Silicide Issues in Silicon Processing
Conf. info. (Number):	2nd
Conf. info. (Venue):	San Francisco, CA, USA
Conf. info. (Date):	2001.04.17-2001.04.19

Similar Items:

1 Conference Proceedings Optimization of Sputtered ZrO2 Thin Films for Alternative Gate Dielectric Nam, Seok-Woo, Yoo, Jung-Ho, Ko, Dae-Hong, Ku, Ja-Hum, Choi, Siyoung, Yang, Cheol-Woong Electrochemical Society	7 Conference Proceedings The Physical and Electrical Properties of Polycrystalline Si1-xGex as a Gate Electrode Material for ULSI CMOS Structures Kang, Sung-Kwan, Ko, Dae-Hong, Ahn, Tae-Hang, Joo, Moon-Sik, Yeo, In-Seok, Whoang, Sung-Jin, Yang, Doo-Young, Whang, … Materials Research Society
2 Conference Proceedings Characterization of CeO2 Thin Films Deposited by Reactive Sputtering Process upon O2 Annealing Yoo, Jung-Ho, Nam, Seok-Woo, Ko, Dae-Hong, Ku, Ja-Hum, Choi, Siyoung Electrochemical Society	8 Conference Proceedings Hydrodynamic Loads Calculation of Pressurizer Safety Valve Discharge Piping Using RELAP5/MOD3.1 Computer Code Kyu Bok Lee, Heedo Lee, Jae Sik Jeung, Hee Jin Ko, Chang Hyo Kim American Society of Mechanical Engineers
3 Conference Proceedings A Study on the Solid Phase Reaction and Thermal Stability in the Ni-Sil-x Gex System Using Rapid Thermal Annealing (RTA) Process Choi, H.-J., Kim, H.-Y., Ko, D.-H., Ku, J.-H., Choi, C.-J., Choi, S., Fujihara, K., Kang, H.K., Yang, M-H., Yang, C.-W. Electrochemical Society	9 Conference Proceedings THERMODYNAMIC STABILITY OF PtAl THIN FILMS ON GaAs Ko, Dae-Hong, Sinclair, Robert Materials Research Society
4 Conference Proceedings Formation and Properties of Co-Suicide by Using Col-x Tax Alloy Kim, M.-J., Lee, D.-H., Ko, D.-H., Ku, J.-H., Choi, S., Fujihara, K., Kang, H.-K., Oh, S-H., Park, C.-G., Lee, H.-J. Electrochemical Society	10 Conference Proceedings Ni Salicide Technology for Deep Sub-Quarter Micron Transistor Choi, C.-J., Ku, J.-H., Choi, S., Fujihara, K., Kang, H.-K., Moon, J.-T., Choi, H.-J., Ko, D.-H. Electrochemical Society
5 Conference Proceedings Sensitivity Studies on Thermal-Hydraulic Behavior Associated With LOFT Total Loss-of-Feedwater Accident Kyu Bok Lee, Heedo Lee, Hee Jin Ko, Ho Je Seong, Jae Sik Jeung, Chang Hyo Kim American Society of Mechanical Engineers	11 Technical Paper The Stability Analysis of Steering and Suspension Parameters on Hands Free Motion Kim,Hyo-Seok, Do,Won-Joo, Shim,Jeong-Soo, Choi,Seung-Ryul Society of Automotive Engineers
6 Conference Proceedings Optical Study of SiO2/Nanocrystalline-Si Multilayers Using Ellipsometry Lee, Kang-Joo, Kang, Tae-Dong, Lee, Hosun, Hong, Seung Hui, Choi, Suk-Ho, Kim, Kyung Joong, Moon, Dae Won Materials Research Society	12 Conference Proceedings Electron Emission From Gated Diamond Emitter Array Ha, Seung-Chul, Kang, Dae-Hwan, Kim, Byung-Sung, Min, Seok-Hong, Kim, Ki-Bum MRS - Materials Research Society

1

2

3

4

5

6

7

8

9

10

11

12