Relationships Between Microstructure and Reliability in PZT MEMS
- Author(s):
- Publication title:
- Transport and microstructural phenomena in oxide electronics : symposium held April 16-20, 2001, San Francisco, California, U.S.A.
- Title of ser.:
- Materials Research Society symposium proceedings
- Ser. no.:
- 666
- Pub. Year:
- 2001
- Pages:
- 9
- Pub. info.:
- Warrendale, PA: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558996021 [1558996028]
- Language:
- English
- Call no.:
- M23500/666
- Type:
- Conference Proceedings
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