Electromechanical Properties of Amorphous and Microcrystalline Silicon Micromachined Structures

Electromechanical Properties of Amorphous and Microcrystalline Silicon Micromachined Structures

Author(s):

Publication title:

Amorphous and heterogeneous silicon-based films - 2001 : symposium held April 16-20, 2001, San Francisco, California, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

664

Pub. Year:

2001

Pages:

6

Pub. info.:

Warrendale: Materials Research Society

ISSN:

02729172

ISBN:

9781558996007 [1558996001]

Language:

English

Call no.:

M23500/664

Type:

Conference Proceedings

Details

TDL ID:	ZA00014547
Series ID:	PA00000011
Conf. info. (Name):	Symposium on amorphous and heterogeneous silicon-based films
Conf. info. (Number):	2001
Conf. info. (Venue):	San Francisco, CA, USA
Conf. info. (Date):	2001.04.16-2001.04.20

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