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High-Rate Deposition of a-SiNx:H Films for Photovoltaic Applications

Author(s):
Kessels, W.M.M.
Assche, F.J.H. van
Hong, J.
Moschner, J.D.
Lauinger, T.
Schram, D.C.
Sanden, M.C.M. van de
2 more
Publication title:
Amorphous and heterogeneous silicon-based films - 2001 : symposium held April 16-20, 2001, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
664
Pub. Year:
2001
Pages:
6
Pub. info.:
Warrendale: Materials Research Society
ISSN:
02729172
ISBN:
9781558996007 [1558996001]
Language:
English
Call no.:
M23500/664
Type:
Conference Proceedings

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