Measurement of Electrical Charge During Nanoindentation of Ferroelectric Thin Films
- Author(s):
- Publication title:
- Materials science of microelectromechanical systems (MEMS) devices III : symposium held November 27-28, 2000, Boston, Massachusetts, U.S.A.
- Title of ser.:
- Materials Research Society symposium proceedings
- Ser. no.:
- 657
- Pub. Year:
- 2001
- Pages:
- 6
- Pub. info.:
- Warrendale, Pa.: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558995673 [1558995676]
- Language:
- English
- Call no.:
- M23500/657
- Type:
- Conference Proceedings
Similar Items:
1
Conference Proceedings
Nanoindentation of multilayer PZT/Pt/SiO2 thin film systems on silicon wafers for MEMS applications
Materials Research Society |
Materials Research Society |
2
Conference Proceedings
Tailoring of the Elastic Properties by Texture Control in Ferroelectric Thin Films for MEMS
Trans Tech Publications |
Materials Research Society |
3
Conference Proceedings
Mapping of the Initial Volume at the Onset of Plasticity in Nanoindentation
Materials Research Society |
9
Conference Proceedings
COMPUTER SIMULATION STUDY OF THE EFFECT OF DEFECTS ON SWITCHING IN FERROELECTRIC THIN FILMS
Materials Research Society |
Materials Research Society |
Materials Research Society |
Materials Research Society |
11
Conference Proceedings
Thin Film Fracture During Nanoindentation of Hard Film-Soft Substrate Systems
Materials Research Society |
6
Conference Proceedings
Adaptive Protocol for Robust Estimates of Coatings Properties by Nanoindentation
Materials Research Society |
Materials Research Society |