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Asymmetrical Polysilicon Electrothermal Microactuators for Achieving Large In-Plane Mechanical Forces and Deflections

Author(s):
Kolesar, Edward S.
Allen, Peter B.
Boydston, Noah C.
Howard, Jeffery T.
Ko, Simon Y.
Ruff, Matthew D.
Wilken, Josh M.
Wilks, Richard J.
3 more
Publication title:
Materials science of microelectromechanical systems (MEMS) devices III : symposium held November 27-28, 2000, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
657
Pub. Year:
2001
Pages:
6
Pub. info.:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558995673 [1558995676]
Language:
English
Call no.:
M23500/657
Type:
Conference Proceedings

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