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Fabrication of MEMS Components Based on Ultrananocrystalline Diamond Thin Films and Characterization of Mechanical Properties

Author(s):
Sumant, A.V.
Auciello, O.
Krauss, A.R.
Gruen, D.M.
Ersoy, D.
Tucek, J.
Jayatissa, A.
Stach, E.
Moldovan, N.
Mancini, D.
Busmann, H.G.
Meyer, E.M.
7 more
Publication title:
Materials science of microelectromechanical systems (MEMS) devices III : symposium held November 27-28, 2000, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
657
Pub. Year:
2001
Pages:
6
Pub. info.:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558995673 [1558995676]
Language:
English
Call no.:
M23500/657
Type:
Conference Proceedings

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