Oxide Films for Integrated Capacitors in Thin Film Functional Modules
- Author(s):
Klee, M. Kiewitt, R. Bausen, D. Wissen, D. Keur, W. Lok, P. - Publication title:
- Ferroelectric thin films IX : symposium held November 26-30, 2000, Boston, Massachusetts, U.S.A.
- Title of ser.:
- Materials Research Society symposium proceedings
- Ser. no.:
- 655
- Pub. Year:
- 2001
- Pages:
- 11
- Pub. info.:
- Warrendale, Pa.: Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558995659 [155899565X]
- Language:
- English
- Call no.:
- M23500/655
- Type:
- Conference Proceedings
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