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Manufacturability Study for Etching High-Density BST/Pt Capacitors

Author(s):
Hwang, Jay  
Publication title:
Ferroelectric thin films IX : symposium held November 26-30, 2000, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
655
Pub. Year:
2001
Pages:
5
Pub. info.:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558995659 [155899565X]
Language:
English
Call no.:
M23500/655
Type:
Conference Proceedings

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