Suppression of Oxidation of an Epitaxial (100)ZrN Film on Si During the Deposition of Ir Film

Suppression of Oxidation of an Epitaxial (100)ZrN Film on Si During the Deposition of Ir Film

Author(s):

Publication title:

Ferroelectric thin films IX : symposium held November 26-30, 2000, Boston, Massachusetts, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

655

Pub. Year:

2001

Pages:

6

Pub. info.:

Warrendale, Pa.: Materials Research Society

ISSN:

02729172

ISBN:

9781558995659 [155899565X]

Language:

English

Call no.:

M23500/655

Type:

Conference Proceedings

Details

TDL ID:	ZA00014540
Series ID:	PA00000011
Conf. info. (Name):	Symposium on ferroelectric thin films
Conf. info. (Number):	9th
Conf. info. (Venue):	Boston, MA, USA
Conf. info. (Date):	2000.11.26-2000.11.30

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